Perfluoroalkyoxy-polymers, PFA has the same advantages as PTFE with the structure: [CF(OR,)-CF2(CF2-CF2)n]m
OR, represents a perfluoroalkoxy group.
PFA can be melt processed (extruded). The chemical resistance is
comparable to PTFE. PFA is translucent and slightly flexible. It
has greater mechanical strength and higher temperature tolerance than PTFE. Its melting temperature is 305°C.
PFA was first used in the semiconductor industry for injection molded
wafer carriers and similar articles that resisted aggressive chemicals and high
temperature chemical processing. Now, PFA is also considered to be the best material for
semiconductor piping applications, and is accepted for both liquid reagents and UPDI water
handling in advanced processing applications.
