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Types of Flouropolymer (PFA)
Perfluoroalkyoxy-polymers, PFA has the same advantages
as PTFE TeflonŽ with the structure: [CF(OR,)-CF2(CF2-CF2)n]m OR,
represents a perfluoroalkoxy group.
PFA can be melt processed (extruded). The chemical resistance is
comparable to PTFE. PFA is translucent and slightly flexible. It
has greater mechanical strength and higher temperature tolerance
than PTFE. Its melting temperature is 305°C.
"PFA was first used in the semiconductor industry for injection
molded wafer carriers and similar articles that resisted aggressive
chemicals and high temperature chemical processing. Now, PFA is
also considered to be the best TeflonŽ for semiconductor piping
applications, and is accepted for both liquid reagents and UPDI
water handling in advanced processlng appllcations." PFA
: TeflonŽ PFA
Reference: Burggraaf, P., Semiconductor International, July 1988,
p.55.
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